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Four hot spots of integrated smart sensor:
1. Physical transformation mechanism
Since the integrated intelligent sensor can easily correct the nonlinear transfer function, a linearity is obtained
Therefore, some researchers are studying the conversion mechanism or materials with good stability, high accuracy and high sensitivity.
, for example, resonant sensor has high stability, high precision, accurate digital output and many other advantages, but the traditional sensor frequency signal detection needs more complex equipment, restrict the application and development of the resonant sensor, now using the same silicon integrated intelligent detection circuit, can quickly extract frequency signal, resonant declined in mechanical sensors become a research hotspot in the field of sensors in the world.
2. Data fusion theory
Data fusion is an important field of integrated intelligent sensor theory, and also a research hotspot in various countries. Data fusion technology,
In short, multiple sensors or multiple sources of information are processed comprehensively, so as to get more accurate and reliable conclusions. For the array composed of multiple sensors, data fusion technology can give full play to the characteristics of each sensor, make use of their complementarity and redundancy, improve the accuracy and reliability of measurement information, and extend the service life of the system. Data fusion is a kind of data synthesis and processing technology, which is the integration and application of many traditional disciplines and new technologies, such as communication, pattern recognition, decision theory, uncertainty theory, signal processing, estimation theory, optimization technology, computer science, artificial intelligence and neural network, etc. In recent years, many scholars have introduced genetic algorithm, wavelet analysis technology and virtual technology into data fusion technology.
3.CMOS process compatibility
At present, while studying the secondary integration technology abroad, the research focus of integrated intelligent sensor in the process is concentrated in
A variety of sensor structures and manufacturing process flow compatible with CMOS process are developed, and breakthroughs in manufacturing process and micro-machining technology are sought. Using CMOS compatible integrated humidity sensor is sensitive to the capacitance and processing circuits are integrated on a silicon wafer, full range is obtained by Coventor simulation general sensitive humidity-sensitive capacitance value change, at the same time improve the reliability and reduces the cost, with the gradual development of micro mechanical processing technology, made with CMOS technology manufacturing integrated humidity sensor has become a focus of research. Based on CMOS process compatibility, the dynamic range extension technology of image sensor has been improved.
4. Miniaturization of sensors
The miniaturization of integrated intelligent sensors is by no means merely a reduction in size, but a new mechanism
A high-tech micro system with structure, new functions and new functions, which is integrated with advanced technology on an intelligent level. Its miniaturization is mainly based on the following development trends: miniaturization in size and enhancement in nature; Integration of various elements and diversification of uses; Systematization in function, intelligentization and compound in structure.
The wireless temperature sensor in this design is a scientific research project under study. For the time being, it only uses a temporary combination of various devices. If the scheme enters the mature stage, it can be integrated on a chip to realize its miniaturization.
1.3 Source and significance
The three bases of modern information technology are information acquisition (namely sensor technology), information transmission (communication technology) and information processing (computer technology). Sensors are cutting-edge products of information technology, especially temperature sensors, which are widely used in industrial and agricultural production, scientific research and life, etc., ranking first in the number of sensors. In the past hundred years, the development of temperature sensor has undergone three stages. (1) Traditional discrete temperature sensors (including sensitive elements); (2) Analog integrated temperature sensor/controller; (3) Intelligent temperature sensor. At present, the new temperature sensor in the world is developing from analog to digital, from integration to intelligence and network.
After entering the 21st century, intelligent temperature sensor is developing rapidly in the direction of high precision, multi-function, bus standardization, high reliability and safety, development of virtual sensor and network sensor, and development of single-chip temperature measurement system. With the continuous promotion of the use of heat metering in urban heating by the state, the heat meter project will become a high-tech and high-benefit investment project, which will drive a new industrial group with annual output value of tens of billions, and its sustainable development period will be more than 15 years. Under the guidance of the relevant policies of the state, at present, the whole country is undergoing heating household transformation, in the next few years, the state will gradually implement heating household metering charges by using heat, at that time will give birth to a very large real-time online heating meter market. Therefore, household calorimeter is an essential tool for heating commercialization and an important measure for building energy conservation. With the development of heating industry, it will be widely used. Wireless temperature sensors are used as part of a heat meter to measure the backwater temperature. The wireless temperature sensor in this design is a component to measure the backwater temperature, in order to solve the current domestic and foreign heat meter production units commonly used wired collection backwater temperature caused by the construction installation inconvenience and low reliability of the outstanding common problems. In order to adapt to the actual situation of the use of civil metering instruments in China, to achieve the purpose of saving energy and balance of supply and demand.
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