Recently, Japan's industrial technology research institute's team with Japanese CHINO, cooperation, successfully developed to high near 1000 degrees Celsius, accurate measurement temperature platinum resistance thermometer. In the past, in the semiconductor manufacturing need to accurately measure the temperature, the places are used to platinum ( Platinum) For the sensor platinum resistance thermometer. However, near the high temperature at 1000 degrees Celsius, platinum resistance rate is not stable, and the white gold itself will also produce thermal distortion, so it is difficult to realize high precision measurement. For the development of high temperature at 1000 degrees Celsius can also has a stable resistivity temperature sensor, the team analyzed the platinum resistance thermometer that sells on the market research, after proper heat treatment, the sensor using the national standard of water device triple point and freezing point of silver is repeated thermal cycling test, analysis of different temperature resistance changes. Results show that after heat treatment, platinum temperature sensor resistance near 1000 degrees Celsius to realize minimization, thermometer more stable performance. In addition, through adjusting and optimizing the structure of platinum wire, make its heat distortion degree of ease. It is understood that the new development of the thermometer in the freezing point of the bank's 961. 78 degrees Celsius, the scope of measured values change for & plusmn; 0. 001 degrees ( Before to 0. 01) ; The triple point of water 0. 01 c, measured values change also stable in & plusmn; 0. No more than 0005 degrees, the world's highest level.
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